Focussed ion beam based fabrication of micro-electro-mechanical resonators

Bandwidth-tunable add-drop filters based on micro-electro-mechanical-system actuated silicon microtoroidal resonators.

A bandwidth-tunable filter has been demonstrated based on a micro-electro-mechanical-system (MEMS) actuated single-crystalline silicon microtoroidal resonator. Bandwidth is tuned from 2.8 to 78.4 GHz by voltage control, the largest bandwidth tuning range reported to date to our knowledge in resonator-based filters. A 21.8 dB extinction ratio is attained as a dynamic add-drop filter.

Design, Fabrication, and Actuation of Micro-Electro-Mechanical System-Based Image Stabilizer

Mathematical Modeling for Thermoelastic Double Porous Micro-Beam Resonators

In the present work, the mathematical model of a homogeneous, isotropic thermoelastic double porous micro-beam, based on the Euler-Bernoulli theory is developed in the context of Lord-Shulman [1] theory of thermoelasticity. Laplace transform technique has been used to obtain the expressions for lateral deflection, axial stress, axial displacement, volume fraction field and temperature distribut...

Micro - Electro - Mechanical - Systems ( Mems )

Damping Ratio in Micro-Beam Resonators Based on Magneto-Thermo-Elasticity

This paper investigates damping ratio in micro-beam resonators based on magneto-thermo-elasticity. A unique aspect of the present study is the effect of permanent magnetic field on the stiffness and thermo-elastic damping of the micro resonators. In our modeling the theory of thermo-elasticity with interacting of an externally applied permanent magnetic field is taken into account. Combined the...